Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983 0841207755, 9780841207752

This digital electronics text focuses on "how to" design, build, operate and adapt data acquisition systems. T

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English Pages 364 Year 1983

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Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
 0841207755, 9780841207752

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